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The Agilent 4156C Precision Semiconductor Parameter Analyzer can perform dc or pulsed force/measure, and stress force. For dc, voltage/ current sweep and sampling (time domain) measurements are available. Specifications.
Voltage Range, Resolution, and Accuracy (HRSMU). Range, Set resolution, Set Accuracy, Measurement resolution, Measurement Accuracy, Max Current. ±2V, 100μV, ±(0.02%+400μV), 2μV, ±(0.01%+200μV), 100mA. ±20V, 1mV, ±(0.02%+3mV), 20μV, ±(0.01%+1mV), 100mA. ±40V, 2mV, ±(0.025%+6mV), 40μV, ±(0.015%+2mV), 100mA (Vout ≤20V)/ 50mA (20V ±100V, 5mV, ±(0.03%+15mV), 100μV, ±(0.02%+5mV), 100mA (Vout ≤20V)/ 50mA (20V Current Range, Resolution, and Accuracy (HRSMU). Range, Set resolution, Set Accuracy, Measurement resolution, Measurement Accuracy, Max Voltage. ±10pA, 10fA, ±(4%+400fA), 1fA, ±(4%+20fA+1fA×Vout/100), 100V. ±100pA, 10fA, ±(4%+400fA), 1fA, ±(4%+40fA+10fA×Vout/100), 100V. ±1nA, 100fA, ±(0.5%+0.7pA+1fA×Vout), 10fA, ±(0.5%+0.4pA+1fA×Vout), 100V. ±10nA, 1pA, ±(0.5%+4pA+10fA×Vout), 10fA, ±(0.5%+2pA+10fA×Vout), 100V. ±100nA, 10pA, ±(0.12%+40pA+100fA×Vout), 100fA, ±(0.1%+20pA+100fA×Vout), 100V. ±1μA, 100pA, ±(0.12%+400pA+1pA×Vout), 1pA, ±(0.1%+200pA+1pA×Vout), 100V. ±10μA, 1nA, ±(0.07%+4nA+10pA×Vout), 10pA, ±(0.05%+2nA+10pA×Vout), 100V. ±100μA, 10nA, ±(0.07%+40nA+100pA×Vout), 100pA, ±(0.05%+20nA+100pA×Vout), 100V. ±1mA, 100nA, ±(0.06%+400nA+1nA×Vout), 1nA, ±(0.04%+200nA+1nA×Vout), 100V. ±10mA, 1μA, ±(0.06%+4μA+10nA×Vout), 10nA, ±(0.04%+2μA+10nA×Vout), 100V. ±100mA, 10μA, ±(0.12%+40μA+100nA×Vout), 100nA, ±(0.1%+20μA+100nA×Vout), 100V (Iout≤20mA)/ 40V (20mA Voltage/Current Compliance (Limiting): The SMU can limit output voltage or current to prevent damaging the device under test. Voltage: 0 V to ±100 V. Current: ±100 fA to ±100 mA. Compliance Accuracy: Same as the current (voltage) settling accuracy.
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